Abstract:Based on the steadystate process of the gas with RF heating after being ionized in the plasma density Non-uniform distribution conditions in quartz tube, the effect of two kinds of antennas, includes 1 Loop and Boswell, on wave fields analyzed in this paper. Helic program is used to solve four coupled radial differential equations for each kz to obtain the wave field along different direction. The result shows that antenna L motivates a strong electrostatic weak magnetic wave field, antenna B motivates a strong electrostatic strong magnetic wave field; within the antenna range, the antenna B motivates the electric field more strongly than L, and the more power is coupled into plasma. The antenna L is more sensitive to the density gradient, and the affect scope of the plasma near the antenna is greater than that of the B. The wave field motivated by the antenna B is more strong.